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Online Courses

Course Description

EMCH 567 - Bio Nano/Micro Electro-Mechan

Class Session: Monday, January 11, 2021 - Wednesday, May 05, 2021

Credit: 3 semester hours of credit

Instructor: Guiren Wang

Term: Spring 2021


Course Description

Nano/microfabrication for nano/microstructures, photolithography, self-assembly, etching techniques, physical and chemical vapor deposition, surface and bulk micromachining, MEMS integration and packaging; applications in Biomedical Engineering; microactuators, biomicrosensors, and biomedical devices.Prerequisite: CHEM 112, CHEM 112L, PHYS 212.FS: 11/05/2014.CL: 2020.

College

EN - College of Engr & Computing

Level

Undergraduate

Section

001

Instructional Method

DWEBS
100% Web Synchronous

CRN

55993

Restrictions

CAMPUSICOL - USC Columbia
FOSALLE999A - Conditional

Information is accurate as of October 21, 2021 (Subject to change)

Special Fee Notification

Students may be required to be proctored during online test completion. If students are unable to attend test proctoring sessions in person at the Distributed Learning office, additional fees may apply for online test proctoring if the course requires online testing.



Contact Office of Distributed Learning



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