Carolina Microfabrication Center (CMC)
At CMC, we provide a one-stop shop with the facilities and expertise to execute your nanoscale concept structures and prototypes. Capabilities span the entire range of nanoscale device development, from lithography, all the way through structural, optical and electrical characterization. Facilities include mask aligners for photolithography, RIE etching, RF sputtering, e-beam evaporation, PECVD thin film deposition, rapid thermal processing (RTP), slow annealing furnaces, spinners, probe stations for electrical characterization, as well as a whole suite of material characterization. These capabilities may be useful to fabricate prototype devices in a variety of applications, such as microfluidics, RF high mobility electron transistors (HEMT’s), nano-biological sensors/systems, optical sensors etc.